Cassette di diffusione

Le cassette di diffusione Fibrothal® sono una soluzione "plug and heat" per la produzione di wafer di silicio cristallino di alta qualità per celle solari e semiconduttori. Le cassette di diffusione sono di massa ridotta con elementi verticali o orizzontali per temperature di esercizio fino a 1.350 °C (2.460 °F). Su richiesta possono essere forniti riscaldatori personalizzati per applicazioni specifiche.

Informazioni

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Depending on the furnace requirements, Kanthal® can accomodate high-temperature demanding processes with our range of heating materials.

Operating Temperature: 300°C -1100°C 600°C - 1250°C 800°C - 1350°C
Primary Element Material (horizontal & vertical): Kanthal® A-1, Kanthal® AMR & Kanthal APM™ Kanthal® A-1, Kanthal® AMR & Kanthal APM™ Kanthal APM™ & Kanthal APM™ HP
Dimensions: Flexible to application requirements, consult factory

Caratteristiche

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Benefits:

Depending on furnace requirements, both element orientations can be designed to perform consistently for extended lifetimes to reduce maintenance and replacement time. With options for Energy Savings Elements or fast cooling, Kanthal heating elements will help you maximize performance.

Applications:

The vertical and horizontal heating elements are used in many different atmospheric and LPCVD thermal processes. This includes pyrogenic oxidation, liquid source deposition as well as silicon nitriding and polysilicon processes.