Fibrothal® diffusion cassettes

Light gauge cassettes are composed of light gauge wires that are cold-formed into sinusoidal patterns or spring-type coils. Light gauge refers to the use of thin wires in the construction of cassettes. This configuration is crucial for precise and controlled diffusion of impurities into the semiconductor material.

Heavy gauge cassettes are composed of a larger gauge resistance wire that is hot formed into a cylindrical shape and then insulated and encased. These cassettes can have varying numbers of zones and are designed to provide consistent and reliable heating in various applications. Hot coiled with specific and controlled power for inner diameter accuracy and reduced wire stress.

The choice between horizontal and vertical furnaces depends on various factors, including the specific semiconductor manufacturing processes being employed and the goals of the fabrication facility. Each orientation has its advantages and disadvantages, and the selection may be influenced by factors such as wafer size, process requirements, and the overall manufacturing workflow.