Heavy gauge heating elements

Heavy gauge heating elements are made from thicker resistance wire that is shaped into a cylinder and then insulated and encased. These heating elements can feature different numbers of heating zones and are designed to deliver consistent and reliable heating across various applications. They are also coiled with precise inner diameter accuracy.

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A typical high-mass heater consists of:

Comb, interlocking, or standard ceramic spacers for wire separation and isolation.
Formed insulation or pre-fired vacuum-formed insulation for coil support and initial insulating layer.
Dry blanket fiber for designed insulation value and balanced compression.
Kanthal® strip material for power leads with ceramic lead locks for added strength and isolation.
Lead bend-backs are positioned to reduce heat loss.
Tooled vacuum-formed ceramic vestibule end insulators.
Varieties of thermocouple position clamps.

Light gauge heating elements

Light-gauge heating elements are made from thin wire formed into sinusoidal patterns or spring-like coils. The term “light gauge” refers to the use of smaller-diameter wire in their construction. This design supports uniform temperature profiles and stable thermal conditions during LPCVD processes.

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Horizontal and vertical heating elements

The choice between horizontal and vertical furnaces depends on various factors, including the specific semiconductor manufacturing processes being employed and the goals of the fabrication facility. Each orientation has its advantages and disadvantages, and the selection may be influenced by factors such as wafer size, process requirements, and the overall manufacturing workflow.