Light gauge heating elements

Light-gauge heating elements are constructed using thin wire formed into sinusoidal patterns or spring-like coils. "Light gauge" refers to the use of smaller-diameter wire in the creation of these elements. This design is essential for achieving uniform temperature profiles and stable thermal conditions during LPCVD steps.

Need to know more?

Get in touch

Information

Applications

LPCVD and Low-Temperature Applications: Used when precise control over low temperatures is required. Applications such as LPCVD; polysilicon, nitride, and low-temperature oxide.

Fast Temperature Response Applications: Ideal for processes that demand rapid temperature changes.

Fast Cool Applications: Efficient in applications requiring quick cooling.

A typical low-mass heater consists of:

Half-shell ceramic molds with embedded wire sinuation or spring coils.
Ceramic mold backed with dry blanket fiber for designed insulation value and balanced compression.
Tooled vacuum-formed ceramic vestibule end insulators.
Varieties of thermocouple position clamps.
Ceramic lead locks on internally bussed elements. Power blocks on externally bussed.

Heavy gauge heating elements

Heavy-gauge heating elements are made from thicker resistance wire, formed into a cylindrical shape, then insulated and encased. They can be designed with multiple heating zones and are built to deliver consistent, reliable heating across a range of applications. The coils are also manufactured with precise inner diameter accuracy.

See product details

Horizontal and vertical heating elements

The choice between horizontal and vertical furnaces depends on various factors, including the specific semiconductor manufacturing processes being employed and the goals of the fabrication facility. Each orientation has its advantages and disadvantages, and the selection may be influenced by factors such as wafer size, process requirements, and the overall manufacturing workflow.